Components Developed or Manufactured by GOYO
L/L PRE HEATER
Energy Saving L/L Pre Heater
Ø300mm·Aluminum · Temperature Uniformity <1%. Low-power energy-saving heater.
Completed
MEASUREMENT
Leak Detection & Classification
Measurement equipment for vacuum/N2 pressure Leak Check before Gas Line Hookup.
OEM Production
VALVE
Symmetrical Valve
Symmetrical high-vacuum valve. Next-generation component for equipment reliability and precision control.
In Development
PLATFORM
Platform Feature Add-on
Custom features available.
Commercialized
Key Equipment Components
QuartzQUARTZ RING / PART
BellowsVACUUM BELLOWS
Shower HeadSHOWER HEAD
Process ChamberPROCESS CHAMBER