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SiC Products

Partner Products

Semiconductor CVD Silicon Carbide
Core Material Components

GOYO Corporation is the official Korean partner of Shenzhen Zhicheng Semiconductor, supplying CVD SiC coating, bulk SiC, sintered SiC products, and TaC coating products.

4.8B CNY
2023 Annual Revenue
8,000+
Monthly Shipments
60+
Patents Held
Zhicheng Semiconductor
Shenzhen Zhicheng Semiconductor Materials Co., Ltd.
  • Founded 2017 · 400+ employees
  • Proprietary CVD equipment development
  • #1 market share in China CVD SiC components
  • ISO 9001 / 14001 / 45001 certified
Official Korean Partner
GOYO Corporation
Product Line
3 Core Product Lines

We supply SiC material components used across all semiconductor manufacturing processes, with product lineups optimized for epitaxy, etching, diffusion, and heat treatment.

CVD SiC Coated Susceptor CVD SiC Coated Tray

CVD SiC Coating Products

CVD SiC / TaC Coated Graphite

Components with SiC or TaC coating layers formed on graphite substrates via CVD. Used in Si / GaN / SiC epitaxy and crystal growth processes.

Max Thickness15 mm
Heat Resistance1,000℃+
Key ProductsSusceptor, Tray
ProcessEpitaxy, MOCVD, Crystal Growth
Focus Ring Ground Ring Showerhead Edge Ring

CVD Bulk SiC Products

CVD-grown SiC Parts

Components made from bulk SiC material grown using CVD equipment. Used as core parts in IC CCP etching equipment.

Crystal QualityWorld-class
PurityUltra-high purity
Key ProductsFocus/Edge/Ground Ring, Showerhead
ProcessCCP Etching
SiC Boat & Tube

Sintered SiC Products

Sintered SiC Parts

SiC components manufactured by sintering. Used in heat treatment equipment for semiconductor diffusion, oxidation, and annealing processes.

Chemical ResistanceExcellent
Key ProductsSiC Tube, Boat, Paddle
ProcessDiffusion / Deposition / Oxidation (LPCVD)
TypeVertical / Horizontal
Applications & Customers
Applications & Key Customers

Supplying a wide range of industries from semiconductor ICs to photonics, compound semiconductors, and solar energy.

Product/Service Key Customers Application
SiC Epitaxy Parts Co. N, J, S Compound Semiconductor
MOCVD Parts Co. A, H, F Photonics (LED)
Si Epitaxy Parts Co. N, C Semiconductor IC
Etching Parts Co. B, Y, Z IC Manufacturing
Coating Service Co. G Solar Energy

🏭 Stable Mass Production

Monthly shipment capacity of 8,000+ established since 2023. Supply stability secured through vertical integration from raw materials to CVD equipment.

🔬 Custom Development Service

Susceptor designs optimized for customer recipes. Demonstrated 1.2%p improvement in LED epitaxial wafer yield vs. competitors.

⚡ Fast Delivery

Standard lead time of 45 days reduces customer operating costs. Emergency response and dedicated technical support teams operate around the clock.

🇰🇷 Korean Partner Support

GOYO Corporation directly provides domestic technical consultation, quotation, delivery coordination, and after-sales service.

Performance
Supply Track Record

Verified results deployed in actual customer production processes.

2.5M+
6-inch SiC epitaxial wafers
produced using Zhicheng parts
33M+
4–6 inch GaN LED
epitaxial wafers produced
#3
CVD SiC component
market share in China (2022)
#1
Ranked #1 among Chinese firms
in CVD SiC market
Technical Specifications
CVD SiC Technical Specifications

High-quality silicon carbide properties achieved through proprietary CVD equipment.

Material Properties
Max Thickness (CVD SiC)15 mm
Crystal StructureBeta (β)-SiC (3C)
HardnessMohs 9+ (9.5)
Heat Resistance1,600℃ (inert atmosphere)
Chemical ResistanceResistant to HF, HNO₃, KOH
Purity99.9999%+
Production Capacity
Monthly Capacity8,000+ units
Machining Precisionμm-class CNC
FacilitiesDongguan 15,000㎡ + Guangzhou 25,000㎡
CVD EquipmentProprietary design & manufacture
Inspection Method100% CMM inspection
Quality CertificationISO 9001 / 14001 / 45001
Company History
Zhicheng Semiconductor History

Growth trajectory leading China's CVD SiC localization since founding in 2017.

2017 · 12
Zhicheng Semiconductor founded. R&D of CVD SiC coated graphite components initiated.
2018
Dongguan factory established. In-house SiC coated graphite Susceptor successfully developed. First customer validation passed — import substitution achieved.
2019 ~ 2020
ISO certified. High-tech enterprise certification. Guangzhou factory established (Nov 2020). SiC coating service launched → solar market entry. Bulk SiC product R&D initiated.
2021 ~ 2022
Dongguan factory 2nd expansion completed. Bulk SiC & sintered SiC prototyping begins. Mature product revenue surges. Ranked #8 globally, #1 in China in CVD SiC components (QY Research 2022).
2023
Monthly shipment capacity 8,000+ established. Designated national-level "Little Giant" enterprise. Annual revenue ¥480M CNY. New Dongguan production base in preparation.
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