Manufacturing Facilities
Equipment Manufacturing Site
Assembly 300 pyeong, Cleanroom Class 10,000, 5-ton crane, 150kW power, Capacity 10 units (5×10m).
Precision Machining Plant
Core component manufacturing and verification at the 200-pyeong Pyeongtaek Seothan machining site and quality inspection room.
In-house Research Institute
Continuously advancing new technology development for equipment and components through our dedicated R&D department.
Partner Network
Organic collaboration with specialized partners in precision machining, technology development, utility piping, and electrical systems.
ASSEMBLY SITE
Assembly Site 300 pyeong / Cleanroom Class 10,000
Precision Machining Site · Pyeongtaek Seothan 200 pyeong
Quality Inspection Room · Precision Measurement & Verification
Machining Equipment
We are continuously expanding precision machining equipment including MCT and general-purpose lathes to increase production capacity.
Machining Center
Machining Center
General-Purpose Lathe
Precision Cleaning
We provide precision cleaning of semiconductor process components tailored to the characteristics of ETCH, CVD, Diff, and IMP processes — removing contaminants and residue to extend part life and improve process stability.
ETCH
- Lower / Upper Liner
- Liner MESA · C3 Screen
- SiC Shower Head
- HUB MESA Gas Injector
CVD
- Gas Box Dome · Face Plate
- Heater · Vector Bellows
- Spindle Plate · Vac Valve
- Shower Head · Chiller Plate
Diff
- DPN Dome · EPI Chamber
- End Plate · Susceptor
- Elbow · VAC Line · Flange
- Bellows · Upper Dome
IMP
- ASS'Y Ion Sources
- Manipulator Assy
- V4 Valve · Trap Pack
- Corona Ring · Flange
ETCH · Liner / Plate
Shower Head / Screen
Diff · Flange / Elbow
Key Components We Develop and Machine In-House
Energy Saving L/L Pre Heater
Ø300mm, Aluminum, Temperature Uniformity <1%. low-power energy-saving heater.
Completed
Leak Detection & Classification
Measurement equipment that performs vacuum/N2 pressure Leak Check before Gas Line Hookup.
OEM Production
Symmetrical Valve
Symmetrical high-vacuum valve. Next-generation component for equipment reliability and precision control.
In Development
Platform Feature Add-on
Custom features can be added to meet customer specifications.
Commercialized
